Angel,
I have the exact same symptoms. I constantly monitor my breathing. It took me a few weeks to realize that it is 100% anxiety. Trust me, you cannot hurt yourself.
There have been times where I thought my breathing was so off, I was sure I was going to pass out. In fact, I remember times feeling dizzy and lightheaded. Fortunately, (or unfortunately, depending on how you look at it!) these, too, are symptoms of anxiety. I never passed out and my Therapist says that people don't pass out during panic attacks.
I too, have not yet figured out how to turn off the anxious thoughts about my breathing. However, from my experience, I know it can't hurt me - so I don't panic about it anymore.
The program here is helping me understand my anxious thoughts (I'm only on week 2). Are you doing the program?